Four Dimensions Four Point Probe Station

Four Dimensions' Four Point Probe systems measure the sheet resistance / resistivity / thickness of a wide range of materials. We offer a wide range of models, options, and probe heads to suit your materials', measurement, and budget needs. We can also tailor systems to your special requirements.
•All our four-point probe systems (except computerless models) can be modified to measure the pn junction leakage of USJ (range 1E-9 to 1E-2 S/cm2).
•We can extent range up to 8E9 Ohms/square or 8E11 Ohms/square for poly Si or amorphous Si film sheet resistivity measurement.
•We offer precise four point probe head with special needle array, such as rectangular or parallelogram array.

Features:
◾Automated Sheet Resistivity Meter
◾1 mOhm / square to 800 kOhm / square
◾extended range up to 8x1011W/sq
◾temperature compensation option
◾up to to 8" wafer capability or 156mm x 156mm
◾stand alone systems and PC controlled systems with Automap software package

Facility requirements:
◦Power: 100 / 115 / 230 VAC, 50/60Hz, 200 W
◦Vacuum 20 in. Hg
◦Table Footprint (depth, width, height): 22" x 20 " x 14.5" (55.9 cm, 50.8 cm, 36.8 cm)

Automap Software

Features:
◦Cartesian or polar maps with measurements up to more than 600 sites
◦full or partial wafer mapping
◦color 2D contour and 3D mapping
◦1, 5, 9 points measurement arrays, diameter scans, and ASTM/SEMI X-patterns
◦customer specified measurement sites up to 5000 points
◦round or rectangular test patterns
◦thickness correction
◦edge correction
◦temperature correction (optional)
◦measurement units: sheet resistance W/sq, resistivity W-cm, resistance V/I, thickness t(µ), thickness t(Å)
◦easy unit conversion
◦librarian data storage
◦p-n type detection
◦repeatability testing
◦data export to ASCII files or Microsoft Excel
◦remote data access via LAN
◦diagnostics
◦selectable security levels user
◦runs on Microsoft Windows 95/98/2000/NT
◦statistical process control (SPC) option
◦check whether a process is within control limits using X-Bar/R charts and histograms
◦SECS-II optional

Contact us at:

Four Dimensions, Inc.
3140 Diablo Ave.
Hayward, CA 94545
U.S.A.

Phone: (510) 782 1843
Fax: (510) 786 9321
http://www.4dimensions.com