Plasma Cleaning

Feature:

1, The parameters of power rate,cleaning time,flow rate,purification vacuum degree are install.

2, Radio frequency power source(the key part is imported from USA)

3, Flow gas meter is imported from USA, in-out by analog, the range is 0~200ccm,it is adjustable the needle valve and control the gas flow within the range.

4, Electrode adopts high throughput plasma structure, solid and reliable and easy take down.

5, The reaction is rectangle stainless steel chamber, battery lead plate is level placed, the distance is adjustable.

6, Vacuum pump adopts double laparoscope rotary vane pump, the limiting vacuum is below 2Pa,and general adopts outlay.

7, Vacuum pump can chose alarm device once low liquid level